Budapest University of Technology and Economics, Faculty of Electrical Engineering and Informatics

    címtáras azonosítással

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    A tantárgy neve magyarul / Name of the subject in Hungarian: Nanotudomány

    Last updated: 2023. január 18.

    Budapest University of Technology and Economics
    Faculty of Electrical Engineering and Informatics

    Electrical Engineering MSc

    Electable Natural Science Course

    Course ID Semester Assessment Credit Tantárgyfélév
    VIETMA14   3/1/0/v 5  
    3. Course coordinator and department Dr. Bonyár Attila,
    4. Instructors Dr. Attila Bonyár, associate professor, ETT
    5. Required knowledge Physics 1-2, Materials in Electronics, Electronics Technology, Microelectronics
    6. Pre-requisites
    (TárgyEredmény( "BMEVIETMA07", "jegy" , _ ) >= 2
    TárgyEredmény("BMEVIETMA07", "FELVETEL", AktualisFelev()) > 0)

    A fenti forma a Neptun sajátja, ezen technikai okokból nem változtattunk.

    A kötelező előtanulmányi rend az adott szak honlapján és képzési programjában található.

    7. Objectives, learning outcomes and obtained knowledge To study phenomena in organic and inorganic systems where the size of the structures are between a hundred and few million atoms (between 0.2 to 100 nm). The course has three main parts. The first part gives a theoretical background to the physics of nanosystems, including basic quantum mechanics and solid state physics and also problems related to downscaling. The second part, nanotechnology, discusses the physical properties of nanomaterials, their fabrication technologies and their application areas. The third part, nanometrology, introduces the nanoscale microscopy and spectroscopy methods.
    8. Synopsis


    1. Introduction, main definitions and principles of nanoscience. Changing of the physical properties of materials on the nanoscale. The structure of materials in a bottom-up approach.

    2. The effects of geometrical downscaling. The problems of top-down design. Macroscopic physical properties (mechanical, electrical, thermal, optical, etc.) and their microscopic approach.

    3.  Introduction to quantum mechanics. Fundamental quantum mechanical phenomena, problems and their solutions.

    4. The basics of solid-state physics. Solid-state models and their significance from an electrical engineering perspective.

    5. Theory of semiconductors. Transport processes in semiconductors on the nanoscale.

    6. Fabrication technologies of nanomaterials I.: vapor phase and solid phase methods.

    7. Fabrication technologies of nanomaterials II: liquid phase methods, self-assembly.

    8. Fabrication technologies of nanomaterials - Nanolithography I.: Projection and direct writing lithographies, principle of optical, electron beam and ion beam lithography.

    9. Fabrication technologies of nanomaterials - Nanolithography II.: Advanced lithography techniques. Nanoimprint lithography, nano lift-off, laser-interference lithography. Lithography with scanning probe systems (STM, AFM), nanodispensing.

    10. The allotropes of carbon (diamond, fullerenes, carbon nanotubes and graphene). Physical properties, fabrication technologies.

    11. Overview of the investigation methods of nanomaterials. The basics of microscopy, its limitations concerning the various methods. The basics of scanning probe microscopy (SPM) and atomic force microscopy (AFM).

    12. The basics of scanning and transmission electron microscopy (SEM, TEM). Interaction between materials and electron beams.

    13. Spectroscopy on the nanoscale: SEM-EDS, XRF, XPS, AES, Raman, SERS, FT-IR. Possibilities and limitations on the nanoscale.

    Class practices:

    1. Transport processes on the nanoscale. Transport equations, their modelling and their solution with computational methods.

    2. Properties of organic materials on the nanoscale I. Particle size ranges and interactions. Diffusion and collisions, polar-apolar nature. Electron negativity. Oxidation-reduction. Electrochemical potential. Chemical bonds.

    3. Properties of organic materials on the nanoscale II. Classification of organic materials, their roles in living processes. The structure of DNA, proteins, special molecules.

    4. Properties of metallic nanoparticles, plasmonics. Surface and localized surface plasmon resonance and its application areas. Introduction to biosensors. R&D examples from current projects.

    5. Application of nanomaterials in electronics technology and manufacturing. Definition and examples for nanopackaging: nano-interconnection technologies, additive manufacturing technologies with nanomaterials.

    6. Advanced scanning probe microscopy examples. Field microscopy (electrical, magnetic), mechanical property mapping on the nanoscale. Near-field optical microscopy. Processing of SPM images - practical examples.

    7. Laboratory visit at the ETT facilities. Demonstration of the following metrology equipment: AFM, SEM, XRF, FT-IR, 3D-printing etc.

    9. Method of instruction Lectures and class practices
    10. Assessment

    Mid-term period: successful fulfillment of one mid-term test.

    Exams period: written exam. 

    In the final grade the mid-term test is considered with 30% weight.

    11. Recaps Any of the mid-term exams might be re-taken during the supplementary week. There is no second supplementary test.
    12. Consultations Continuously, at times agreed with the instructor. Special consultation possible before the midterm test/exam if needed.
    13. References, textbooks and resources E-learning materials developed by the department that cover the whole course.

    Bhushan, Bharat: Handbook of Nanotechnology (Spinger)

    Bharat Bhushan: Handbook of Micro/Nano Tribology (CRC)

    14. Required learning hours and assignment
    Contact hours
    Preparation for lectures
    Preparation for mid-term test
    Homework 0
    Studying of written materials
    preparation for the exam
    SUM 150
    15. Syllabus prepared by Dr. Attila Bonyár, associate professor, ETT
    IMSc program -
    IMSc score -