Budapest University of Technology and Economics, Faculty of Electrical Engineering and Informatics

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    Fundamentals of Smart Systems

    A tantárgy neve magyarul / Name of the subject in Hungarian: Fundamentals of Smart Systems

    Last updated: 2018. november 23.

    Budapest University of Technology and Economics
    Faculty of Electrical Engineering and Informatics
    Branch of Electrical Engineering
    MSc
    Smart Systems Integration specialization

    Course ID Semester Assessment Credit Tantárgyfélév
    VIEEMA04 1 2/1/0/v 4  
    3. Course coordinator and department Dr. Szabó Péter Gábor, Elektronikus Eszközök Tanszéke
    4. Instructors

    Name:

    Affiliation:

    Department, institute:

    Dr. Péter Neumann

    Assistant professor

    Department of Electron Devices

    Dr. Péter Gábor Szabó

    Associate professor

    Department of Electron Devices

    Dr. Ferenc Ender

    Assistant professor

    Department of Electron Devices

    5. Required knowledge

    Physics, microelectronics, electronics technology

    7. Objectives, learning outcomes and obtained knowledge

    The course aims to develop a detailed knowledge and critical understanding of Smart Systems technologies and the physics of MEMS devices. A significant range of principal and specialist skills will be developed in the fields of Smart Systems manufacturing technology, and its applications in MEMS and bio-MEMS devices. During the laboratory work, state-of-the-art smart systems are disassembled, discussed and analyzed.

    8. Synopsis

    Lecture topics:

    1. Overview of smart systems, cyber-physical system, Internet-of-Things devices and concepts.
    2. The concept and building blocks of integrated smart systems.
    3. Cellphone as a smart system. Hierarchy of smartphones.
    4. MEMS sensors and actuators inside a smart system.
    5. Overview of smart system manufacturing technologies.
    6. Manufacturing processes of integrated electronics and micro electro-mechanics (MEMS).
    7. Packaging of integrated smart systems.
    8. Micromechanics, electro-mechanical coupling
    9. Analysis of typical electro-mechanical microsystems – micromirror, comb-drive, gyroscopes
    10. Thermal microsystems, electro-thermal coupling
    11. BioMEMS - fundamentals of microfluidics: laminar flow, mixing, flow focusing. Transport phenomenon: convective and conductive mass transfer, diffusion in microflows. Droplet microfluidics: fundamentals and applications. Flow map, typical multiphase flow regimes. Enhanced heat transfer in Taylor flow, mixing in microdroplets, compact modeling of two phase flows. Droplet manipulation, EWOD
    12. Lab-on-a-Chip devices: Point-of-Care. LoC platforms and PoC concepts: case studies. Sample consumption, sample handling, throughput, sensitivity, specificity, resolution.
    13. Physical methods - Sorting and counting techniques: hydrodinamic focusing, optical counting methods, scattering histogram plots, fluorescence activated cell sorting, impedance methods, Coulter counter
    14. Biosensors in LoC devices: physical, electrochemical, electronic and optical methods. DNA manipulation techniques: data storage in DNA, Polymerase Chain Reaction (PCR) and Next Generation Sequencing (NGS)

    Classroom/laboratory practice topics:

     

    1. Inside the package - Testing and characterization of integrated electronics, sensors and MEMS (laboratory demonstration)
    2. Cleanroom visit - Dicing, bonding and packaging of microsystems (laboratory demonstration)
    3. Semiconductor technology at work (video documentary and discussions)
    4. MEMS case-study - operation, simulation and characterization of a heatuator MEMS (computer laboratory demonstration)
    5. Modeling of MEMS - compact modelling, reduced order modeling, multi-domain modeling (computer laboratory demonstration)
    6. Fundamental effects in microfluidics (laboratory demonstration)
    9. Method of instruction

    2 hours/week lectures and 1 hour/week (computer) laboratory practices including demonstration with practical examples and case studies.

    10. Assessment

    a.         During the term: one mid-term test in the 9th week.

    Requirement for granting the signature: >= 2 (satisfactory).

    The signature is valid for the next semester, too.

    b.         In the exam period:

     

    Way of examination: written and oral.

    11. Recaps

    On mid-term test. If a student fails to turn up at mid-term test, it can be repeated during the term. Failed mid-term test can only be repeated once. In principle there is no second repeat for the failed mid-term test.

    12. Consultations

    By appointment with the instructors.

    13. References, textbooks and resources

    Mandatory curriculum:

    -        Periodically updated electronic tutorials by the instructors

    Optional, auxiliary resources

    -        G. S. May, S. M. Sze: “Fundamentals of Semiconductor Fabrication”, Wiley, 2003. ISBN: 0-471-23279-3

    -        J. S. Wilson: “Sensor Technology Handbook”, Elsevier-Newnes, 2005. ISBN: 0-7506-7729-5

    -        D. K. Schröder: “Semiconductor Material and Device Characterization”, Wiley-Interscience, 2006. ISBN: 978-0-471-73906-7

    -        S. M. Sze, Kwok K. Ng: “Physics of Semiconductor Devices”, Wiley-Interscience, 2007

    -        M. Gad-el-Hak: “MEMS Design and Fabrication”, CRC Press, 2006. ISBN: 978-0-8493-9138-5

    -        R. R. Tummala: “System on Package: Miniaturization of the Entire System”, McGraw-Hill, 2008. ISBN: 9780071459068

    -        H. Geng: “Semiconductor Manufacturing Handbook”, McGraw-Hill, 2004.

    -        J. A. Kubby: ”A Guide to Hands-on MEMS Design and Prototyping”, Cambridge University Press, 2011. ISBN 978-0-521-88925-4

    -        Brand, Fedder, Hierold, Korvink, Tabata: “System-level Modeling of MEMS”, Wiley-VCH, 2013. ISBN 978-3-527-31903-9

    -        H.-H. Lee: “Finite Element Simulations with ANSYS Workbench 15”, SDC Publications, 2014. ISBN: 978-1585039074

    -        S. D. Senturia: “Microsystem Design”, Kluwer Academic Publishers, 2001. ISBN: 0-7923-7246-8

    -        M. W. Collins, C. S. Konig: “Micro and Nano Flow Systems for Bioanalysis”, Springer New York, 2012.

    -        D. Issadore, R. M. Westervelt: “Point-of-Care Diagnostics on a Chip”, Springer New York, 2013.

    -        G. Evtugyn: “Biosensors: Essentials”, Springer New York, 2014.

    14. Required learning hours and assignment

    Classes

    42

    Preparation for lecture classes

    14

    Preparation for classroom practices

    8

    Preparation for laboratories

    0

    Preparation for test

    16

    Homework

    0

    Learning the prescribed matters

    0

    Preparation for exam

    40

    Összesen

    120

    15. Syllabus prepared by

    Name:

    Affiliation:

    Department, institute:

    Dr. László Juhász

    Assistant professor

    Department of Electron Devices

    Dr. Péter Neumann

    Assistant professor

    Department of Electron Devices

    Dr. Péter Gábor Szabó

    Associate professor

    Department of Electron Devices

    Dr. Ferenc Ender

    Assistant professor

    Department of Electron Devices