IC and MEMS design

A tantárgy neve magyarul / Name of the subject in Hungarian: IC és MEMS tervezés

Last updated: 2019. május 6.

Budapest University of Technology and Economics
Faculty of Electrical Engineering and Informatics

Major in Electrical Engineering

EU Erasmus Mundus Joint International

Master in Smart Systems Integration

MSc course

Course ID Semester Assessment Credit Tantárgyfélév
VIEEM164 1 2/1/0/v 4  
3. Course coordinator and department Dr. Takács Gábor,
4. Instructors




Dr. Gábor TAKÁCS

assistant professor

Department of Electron Devices

Dr. András POPPE

associate professor

Department of Electron Devices

Dr. Ferenc ENDER

associate professor

Department of Electron Devices

5. Required knowledge

6. Pre-requisites
NEM ( TárgyEredmény( "BMEVIEEMA02" , "jegy" , _ ) >= 2
VAGY TárgyEredmény("BMEVIEEMA02", "FELVETEL", AktualisFelev()) > 0
VAGY TárgyEredmény( "BMEVIEEMB00" , "jegy" , _ ) >= 2
VAGY TárgyEredmény("BMEVIEEMB00", "FELVETEL", AktualisFelev()) > 0 )

A fenti forma a Neptun sajátja, ezen technikai okokból nem változtattunk.

A kötelező előtanulmányi rend az adott szak honlapján és képzési programjában található.

7. Objectives, learning outcomes and obtained knowledge

The goal of the subject is to present the students the methodology of the design of modern analog/mixed signal and MEMS integrated circuits, the tools and modern developer softwares, and the basic design steps. The subject includes the description of architecture and functions of modern CAD softwares, and it presents the design methods of MEMS devices.

8. Synopsis

In the frame of the subject the students get the knowledge of the basic principles and design methodology of the integrated circuits and MEMS devices. They get an overview from the system level design to the physical design. During the laboratory practices the students use industrial standard developer tools.

Weekly breakdown:

Week 1: Basics of system level design: FPGA, gate array, standard cell and full custom design. IC as a implementation form.

Week 2: (C)MOS principles, design rules.

Week 3: Implementation of basic digital gates and simple circuits on transistor level: the schematics, the layout and sizing

Week 4: Design tools. Open design tools. Cadence Opus and Mentor design tools as examples. Designer’s database, configurations.

Week 5: Methodology of IC design. Abstraction levels, simulations and validations. Top-down and bottom-up design methodology.

Week 6: Standard cell IC design. Cell library. Input forms: schematics, HDL description, blocks.

Week 7: Pre-layout simulation. Floor plan, detailed layout, post-layout simulation.

Week 8: Design for testability. Fault models, fault detection. The D-algorithm, ATPG, DFT, Scan-Path.

Week 9: Perspectivity of IC technology, trends. Full system integration on a single chip: passive devices and non-electronic functions.

Week 10: Problems with Deep-submicron technology, dissipation density, temperature-aware design

Week 11: Strategies of MEMS design. Presentation of different application specific design methodologies through different examples.

Week 12: Coupled physical modelling, multi-domain models,

Week 13: Modelling and simulation of MEMS devices. Numeric methods (Finite Element Analysis, Reduced Order Modelling, multi-physics simulations).

Week 14: General physical simulation softwares, MEMS design software tools.

9. Method of instruction

Theory, computer laboratory.

10. Assessment


a.       In the lecturing period:


One midterm test. The condition of the signature is achieving minimum fair level at the test.


b.           In the exam period:


Oral exam.


c.            Pre-exam:




11. Recaps

To repeat the test one occasion is assured during the lecture period.

12. Consultations

Consultation is assured every week. The time and place of the consultation will be agreed with the students. Before the test special consultation will be offered.

13. References, textbooks and resources

Wai-Kai Chen , ”The VLSI handbook”, CRC Press LLC, 2000. ISBN 0-8493-8593-8

Mohamed Gad-el-Hak, ”MEMS Design and Fabrication”, CRC Press LLC, 2006. ISBN 0-8493-9138-5

Stephen D. Senturia, „Microsystem design” Kluwer Academic Publishers. 2002. ISBN 0-7923-7246-8

Lecture notes on http://edu.vik.bme.hu

14. Required learning hours and assignment



Prep. for lectures


Prep. for practices


Prep. for labs


Prep for midterm test






Prep. for exam




15. Syllabus prepared by




Dr. György BOGNÁR

associate professor

Dept. of Electron Devices


h. associate professor 

Dept. of Electron Devices

Dr. Sándor RESS

associate professor     

Dept. of Electron Devices

Dr. Péter SZABÓ

associate professor

Dept. of Electron Devices

Dr. Gábor TAKÁCS

assistant professor

Dept. of Electron Devices