BME VIK - Napelemek laboratórium

A tantárgy neve magyarul / Name of the subject in Hungarian: Napelemek laboratórium

3. Course coordinator and department Dr. Plesz Balázs,

4. Instructors


Dr. Mizsei János	professor	Elektronikus Eszközök Tsz
Dr. Plesz Balázs	associate professor	Elektronikus Eszközök Tsz
Dr. Neumann Péter Lajos	assistant professor	Elektronikus Eszközök Tsz

5. Required knowledge Electron physics, Physics, Microelectronics

6. Pre-requisites

Kötelező:

NEM ( TárgyTeljesítve("BMEVIEEM358"))
VAGY
NEM ( TárgyTeljesítve("BMEVIEEJV55"))
VAGY
NEM ( TárgyTeljesítve("BMEVIEE9356"))

A fenti forma a Neptun sajátja, ezen technikai okokból nem változtattunk.

A kötelező előtanulmányi rend az adott szak honlapján és képzési programjában található.

Ajánlott:
The subject cannot be added if the student completed the following subjects:

VIEEM358 Solar Cells Manufacturing and VIEEJV55 Integrated Circuit Manufacturing. The preliminary study of the course VIEEAV99 Solar Cells and Renewable Energy Sources is advised, but not compulsory.

7. Objectives, learning outcomes and obtained knowledge Aim of the subject is to offer an outline on the solar cell’s device physics, manufacturing and technology. During the semester we offer each student the possibility of manufacturing a monocrystalline Si based solar cell in our semiconductor laboratory. The students get acquainted with basic semiconductor fabrication processes, as well as with the influences of the applied technological steps on device operation. The second important objective of the subject is the presentation of the measuring techniques applied to solar cells. The discussion of the problems arising during the measurements contributes to the better understanding of the solar cell operation, thus the students can deepen their theoretical knowledge.

8. Synopsis 1^st. block

Introduction to the operation of solar cells, review of the main parameters and characteristics.

Different raw materials and solar cell types.

2^nd. block

Introduction to solar cell technology, overview of the basic steps of manufacturing.

Fabrication of mono-/multi-crystalline silicon, wafer processing and physical parameters.

3^rd. block

Si wafer types, measurement of their physical parameters, characterization of the raw material (geometrical dimensions, doping types and doping concentrations).

Overview of clean room, function of the clean environment in semiconductor technology.

4^th. block

Wet chemical cleaning of Si wafer, surface texturing, and optical microscopy applied to examine the textured surface.

Backside BSF layer formation with solid phase diffusion, doping material predeposition.

5^th. block

Theoretical review and practical basics of the thermal oxidation of Si, demonstrations and comparison of different oxidized Si wafers.

Calculation of the thermal oxide thickness, simulations.

6^th. block

PSG etching from the back surface, chemical preparation of the wafer and thermal oxidation with calculated parameters.

Thickness measurement of oxide layer, photoresist coating of the wafer.

7^th. block

Theoretical review of the solid phase diffusion.

Determination of the diffusion parameters of the solar cell by simulation.

8^th. block

Front surface oxide etching, pre-deposition and drive-in of the doping material.

Diffusion step characterization: sheet resistance and junction depth measurement, followed by photoresist coating of the Si wafer.

9^th. block

Theoretical basics of UV lithography, overview of lithographic devices employed in semiconductor technology.

Opening of contact windows on the surface of the wafer using wet chemical etching methods.

10^th. block

Metallization of the solar cell, metal layer deposition with vacuum evaporation.

Metal layer thickening by galvanic deposition, measurement of metal layer thickness.

11^th. block

Theoretical overview of measurement techniques used in case of solar cells, presentation of the measuring equipment.

Demonstration of the I-V characterisation techniques by manual measurement for both solar cells and solar modules.

12^th. block

Characterisation of the manufactured solar cell with automatic equipment, comparison between manual and automatic characterisation methods, determination of thermal dependencies of the cell parameters.

Measurement of solar cells manufactured with different technologies, comparison of the results.

13^th. block

Presentation of the concept and the measuring technique of spectral response function. Performing the spectral response measurement, obtaining spectral responses at different temperatures. Drawing conclusions from obtained spectral responses, correlation between the measured electrical parameters.

Correlations between reflexion of the incoming light and the efficiency of the solar cells, reflexion measurements on different surface qualities.

14^th. block

Writing of the mid-semester test, handing in the report.

9. Method of instruction Lesson based overview of the theoretical bases for the laboratory practices, followed by manufacturing technology and measurement/characterization operations performed in the semiconductor laboratory.

10. Assessment During the term:

One mid-semester test. To obtain the mid-semester mark a mid-semester test with at least the mark “sufficient” and the full completion of every laboratory practice is necessary.

11. Recaps An opportunity of a supplementary mid-semester test is provided in case of an unsuccessful mid-semester test in the term period. During the repeat period one additional supplementary mid-semester test can be written. The laboratory practice due to the high costs of the technologies applied can only be repeated during the term, based on special agreement.

12. Consultations Personal discussion with the lecturers.

13. References, textbooks and resources M. A. Green: Applied Photovoltaics

A. Luque: Handbook of Photovoltaic Science and Engineering

T. Markvart , L. Castaner: Practical Handbook of Photovoltaics, Elsevier Science, 2003.

Photovoltaics CDROM, http://pvcdrom.pveducation.org/

14. Required learning hours and assignment

Lessons	28
Mid-term preparations for lessons	10
Preparation for test	10
Házi feladat elkészítése
Study of written materials	12
Vizsgafelkészülés
Total	60

15. Syllabus prepared by

Name:	Status:	Department, Institute:
Dr. Mizsei János	Professor	Dept. of Electron Devices
Timárné Horváth Veronika	Associate Professor h.c.	Dept. of Electron Devices