Microelectronics Laboratory

A tantárgy neve magyarul / Name of the subject in Hungarian: Mikroelektronikai laboratórium

Last updated: 2015. február 6.

Budapest University of Technology and Economics
Faculty of Electrical Engineering and Informatics

Branch of Electrical Engineering
Microelectronics design and manufacture specialization

Course ID Semester Assessment Credit Tantárgyfélév
VIEEAC03 6 0/0/3/f 4  
3. Course coordinator and department Dr. Horváth Péter,
4. Instructors



Department, institute:

Dr. Peter Gaertner

Hon. associate professor

Department of Electron Devices

Dr. György Bognár

Associate professor

Department of Electron Devices

Dr. László Juhász

Assistant professor

Department of Electron Devices

5. Required knowledge

Microelectronics, Electronics 1, Digital technic 1-2

6. Pre-requisites
(Szakirany("AVINmikroterv", _) VAGY
Szakirany("AVImikro", _) )

ÉS (TárgyEredmény( "BMEVIEEAC01" , "jegy" , _ ) >= 2
VAGY TárgyEredmény( "BMEVIEEA328" , "jegy" , _ ) >= 2 )

ÉS (TárgyEredmény( "BMEVIEEAC02" , "jegy" , _ ) >= 2
VAGY TárgyEredmény( "BMEVIEEA329" , "jegy" , _ ) >= 2 )

ÉS NEM ( TárgyEredmény( "BMEVIEEA330" , "jegy" , _ ) >= 2
TárgyEredmény("BMEVIEEA330", "FELVETEL", AktualisFelev()) > 0 )

A fenti forma a Neptun sajátja, ezen technikai okokból nem változtattunk.

A kötelező előtanulmányi rendek grafikus formában itt láthatók.



Signature in Electronics 1.

Obtained credits in Microelectronics
7. Objectives, learning outcomes and obtained knowledge

Students can choose from two practical tasks at the beginning of the semester.

1.      Design of a digital integrated circuit

2.      Semiconductor technology process

In the digital circuit design task, a moderately complex ASIC has to be designed from specification to full layout using a Verilog behavioural description. The circuit can be implemented on an FPGA for verification.

In case of the semiconductor process, the production steps of a simple monolite integrated circuit should be followed from qualifying the semiconductor material to packaging, including doping, oxide growth, photolithography and calibration.

8. Synopsis

Digital design branch

1.      Getting familiar with the hardware environment and operating system.

2.      Getting familiar with open IC design systems. Getting to know a standard IC design system (Mentor/Cadence) through an example.

3.      Design of digital circuits with top-down methodology.

4.      Getting familiar with synthesis tools.

5.      Input of the behaviour of the system using hardware description language.

6.      Validation of operation with logic simulation.

7.      Synthesis, technology-dependent optimization, runtime analysis.

8.      Automatic ASIC layout generation.

9.      Implementation in FPGA, verification.

Semiconductor technology branch

1.      Creation of integrated circuits.

2.      SI wafer preparation.

3.      Thermal oxidation.

4.      Photolithography.

5.      Doping with diffusion.

6.      Metal layer deposition.

7.      Thermal treatment.

8.      Packaging.

9.      Calibration, characterization.

10.  Industrial lookout.


9. Method of instruction

Computer or technology laboratory practice. Design practice is done in computer laboratory in pairs. Technology laboratory takes place in the clean room of the department where groups of 4-6 people go through the technology steps on one wafer. Validation, qualification and calibration of the complete circuit is also the task of the groups. Timetable is arranged in the beginning of the semester.

10. Assessment

The course ends with a mid-term mark. The mid-term mark is based on the work during the semester and the assignments handed in. In the technology laboratory, the condition of the mid-term mark is to finish all process steps and hand in a report.

11. Recaps

There is one repeat possibility in the supplementary period.

12. Consultations

By appointment with the instructors.

13. References, textbooks and resources

Literature accessible on the web page of the department, hand-outs during the laboratories.

14. Required learning hours and assignment
Kontakt óra42
Félévközi készülés órákra21
Felkészülés zárthelyire0
Házi feladat elkészítése36
Kijelölt írásos tananyag elsajátítása21
15. Syllabus prepared by



Department, institute:


Dr. György Bognár

Associate professor

Department of Electron Devices

Dr. Peter Gaertner

Hon. associate professor

Department of Electron Devices

Dr. András Timár

Assistant professor

Department of Electron Devices

Gyula Horváth

Assistant professor

Department of Electron Devices